JPH0184135U - - Google Patents
Info
- Publication number
- JPH0184135U JPH0184135U JP1987180269U JP18026987U JPH0184135U JP H0184135 U JPH0184135 U JP H0184135U JP 1987180269 U JP1987180269 U JP 1987180269U JP 18026987 U JP18026987 U JP 18026987U JP H0184135 U JPH0184135 U JP H0184135U
- Authority
- JP
- Japan
- Prior art keywords
- chuck
- membrane switch
- attached
- diaphragm
- holding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012528 membrane Substances 0.000 claims description 5
- 238000001514 detection method Methods 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims description 2
- 239000002184 metal Substances 0.000 claims 1
- 239000004020 conductor Substances 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987180269U JPH0184135U (en]) | 1987-11-26 | 1987-11-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987180269U JPH0184135U (en]) | 1987-11-26 | 1987-11-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0184135U true JPH0184135U (en]) | 1989-06-05 |
Family
ID=31471789
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987180269U Pending JPH0184135U (en]) | 1987-11-26 | 1987-11-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0184135U (en]) |
-
1987
- 1987-11-26 JP JP1987180269U patent/JPH0184135U/ja active Pending